The SCS P6708 (8-in. bowl) and P6712 (12-in. bowl) precision coating systems are capable of executing thirty full-automated, user-determined coating sequences under the supervision of a programmable logic controller. Each recipe consists of multiple ramp up, hold, and ramp down steps in the range of 100-8,000 RPM. Acceleration and deceleration rates are computer-calculated based on the desired profile.
These models include a simple keypad for programming and operation, and a user interface screen for display of process parameters. The unit is capable of handling a variety of substrate sizes and shapes up to 10 inches in diameter. Optional spin coater features include multiple coating material dispensing valves, interchangeable vacuum chucks, and world-wide voltage values.
Features
- Optional Fluid Dispenser - Designed to be full integrated with our 6700 series. Comes complete with three dispensing needles.
- Coating Types: Photoresists, Anti-Reflectives, Polyimides, Metallo-Organics, Dopants, Silica Films, and Most Organic and Aqueous Solutions
- Speed: 100-8000 RPM, Programmable
- Automatic Timer: 0-999 seconds
- Acceleration/Deceleration: Ramp times from 1.0 to 30 seconds
- Power:115 VAC, 60Hz, 1 amp or 220 VAC, 50Hz, .5 amp
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