SCS G3 Spincoat Series (G3-8, G3P-8, G3P-12 & G3P-15)
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SCS G3 Spincoat Series

The SCS G3 Spin Coater series sets new standards in operating precision and programming flexibility, with a high level of rotation accuracy and repeatability, along with precise acceleration and deceleration control.

The series is available with eight (Model G3-8[non-programmable] and G3P-8[programmable]), twelve (G3P-12) and fifteen-inch (G3P-15) bowls, in three compact enclosure sizes.

 

 

Features
  • Fast, simple programming by means of microprocessor-based control, using front panel LCD display and keypad
  • Close loop servomotor for precise speed regulation
  • Programmable and Non-Programmable (eight-inch only)
  • Communication port for external control using optional PC interface software for programming, profile storage, PID, diagnostics, vacuum on/off, slow speed centering, and programmable house position.
  • Programmable models have the capacity to store and execute up to 30 programs, with up to 20 steps each (unlimited w/ optional software)
  • Spin profiles adjustable in 1.0 rpm rotation increments, 0.1 second timing increments, and 1.0 second increments for dwell time, with precise repeatability from cycle to cycle
  • Encoder allows vacuum chuck to be stopped at a Home position on programmable models
  • Chemically resistant Teflon coated bowl with integral drain
  • Hinged, interlocking cover on all models plus safety glass window on programmable models
  • Programmable spin coater models have an optional integrated dispense arm, optional exhaust adapter, and are equipped to control solenoid operation of an optional dispensing unit.
Specifications
  • Coating Types: Photoresists, Polyimides, Metal-Organics, Dopants and Silica Films
  • Speed: 0-9,999 RPM, Programmable
  • Acceleration/Deceleration: Ramp times from 0.1 to 25.5 seconds, in 0.1 second increments
  • Power: 115 VAC, 60Hz or 230 VAC, 50Hz
Models
  • G3-8: 8-inch, non-programmable
  • G3P-8: 8-inch, programmable
  • G3P-12: 12-inch, programmable
  • G3P-15: 15-inch, programmable
Brochure Download
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